Front cover image for Resonant microsensors

Resonant microsensors

Print Book, English, ©1995
1st ed. 1994, 2nd ed. 1995
UETP-MEMS, FSRM, Switzerland, ©1995
1 volume (various pagings) : illustrations ; 30 cm
33633130
"A course developed by UETP-MEMS University Training Partnership for Micro Electro Mechanical Systems with the support of the EU Programme COMETT."